Plan-view transmission electron microscopy specimen preparation for atomic layer materials using a focused ion beam approach

Lee, L.-H.L.-H.LeeYu, C.-H.C.-H.YuWei, C.-Y.C.-Y.WeiLee, P.-C.P.-C.LeeHuang, J.-S.J.-S.HuangWen, C.-Y.C.-Y.WenCHENG-YEN WEN2020-05-122020-05-122019https://scholars.lib.ntu.edu.tw/handle/123456789/491089[SDGs]SDG3Plan-view transmission electron microscopy specimen preparation for atomic layer materials using a focused ion beam approachjournal article10.1016/j.ultramic.2018.12.0012-s2.0-85057748919https://www.scopus.com/inward/record.uri?eid=2-s2.0-85057748919&doi=10.1016%2fj.ultramic.2018.12.001&partnerID=40&md5=70293c209be01364498e749b09e758e6