Chen, Yi ShengYi ShengChenLiu, Pang YuPang YuLiuNiu, RanmingRanmingNiuDevaraj, ArunArunDevarajHUNG-WEI YENMarceau, Ross K.W.Ross K.W.MarceauCairney, Julie M.Julie M.Cairney2023-05-232023-05-232023-02-0114319276https://scholars.lib.ntu.edu.tw/handle/123456789/631317Atom probe tomography (APT) is an emerging microscopy technique that has high sensitivity for hydrogen with sub-nanometre-scale spatial resolution, which makes it a unique method to investigate the atomic-scale distribution of hydrogen at interfaces and defects in materials. This article introduces the basics of APT-based hydrogen analysis, particularly the challenge of distinguishing a hydrogen background signal in APT by using hydrogen isotopes, along with strategies to yield high-quality analysis. This article also reviews several important findings on hydrogen distribution in a range of materials, including both structural alloys and functional materials, enabled by using APT. Limitations and future opportunities for hydrogen analysis by APT are also discussed.atom probe tomography | hydride | hydrogen embrittlement | hydrogen mapping | hydrogen trapping | metalsother10.1093/micmic/ozac0052-s2.0-85152149829https://api.elsevier.com/content/abstract/scopus_id/85152149829