High-Fidelity TiN Processing Modes for Multigate Ge-Based Quantum Devices

Sinan BuguSheshank BiradarAlan BlakeCheeWee LiuMaksym MyronovRay DuffyGiorgos FagasNikolay PetkovCHEE-WEE LIU2025-03-062025-03-062025-01-10https://scholars.lib.ntu.edu.tw/handle/123456789/725525[SDGs]SDG7High-Fidelity TiN Processing Modes for Multigate Ge-Based Quantum Devicesjournal article10.1021/acsaelm.4c01499