Analysis of microscopic crystallization of two-shot SLS process and its dependence on performance of LTPS devices

Shih, C.-J.C.-J.ShihYeh, W.-C.W.-C.YehFang, C.-H.C.-H.FangLan, C.-W.C.-W.LanCHUNG-WEN LAN2020-01-062020-01-062006https://scholars.lib.ntu.edu.tw/handle/123456789/444922Analysis of microscopic crystallization of two-shot SLS process and its dependence on performance of LTPS devicesconference paper10.1889/1.24334562-s2.0-34547590655https://www.scopus.com/inward/record.uri?eid=2-s2.0-34547590655&doi=10.1889%2f1.2433456&partnerID=40&md5=6605c076221f7a3a054238e6f16fac79