Local stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by Polarized micro-Raman spectroscopy extraction and mechanical modelization

M.-H. LiaoMING-HAN LIAO2021-12-302021-12-302012https://scholars.lib.ntu.edu.tw/handle/123456789/590706SingaporeLocal stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by Polarized micro-Raman spectroscopy extraction and mechanical modelizationconference paper