Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithography

Sheng-Yung ChenShin-Chuan ChenHsing-Hong ChenTing-Han PeiKuen-Yu TsaiHsin-Hung PanKUEN-YU TSAI2018-09-102018-09-102009-11http://scholars.lib.ntu.edu.tw/handle/123456789/352130Manufacturability analysis of a MEMS-based electron-optical system design for direct-write lithographyconference paper