Fast Atom Beam- and Vacuum-Ultraviolet-Activated Sites for Low-Temperature Hybrid Integration

Yang H.-W.Kao C.R.Shigetou A.C. ROBERT KAO2019-11-272019-11-27201707437463https://www.scopus.com/inward/record.uri?eid=2-s2.0-85028548441&doi=10.1021%2facs.langmuir.7b02010&partnerID=40&md5=d0dd2f8efe6fe758d75ddb8094c8b70bhttps://scholars.lib.ntu.edu.tw/handle/123456789/432583Fast Atom Beam- and Vacuum-Ultraviolet-Activated Sites for Low-Temperature Hybrid Integrationjournal article10.1021/acs.langmuir.7b020102-s2.0-85028548441