蔡睿哲Tsai, Jui-Che臺灣大學:光電工程學研究所謝典良Hsieh, Tien-liangTien-liangHsieh2010-07-012018-07-052010-07-012018-07-052008U0001-2607200811184000http://ntur.lib.ntu.edu.tw//handle/246246/188435近年來光學微機電在許多領域的地位逐漸重要，像是光纖通訊，顯示科技和生醫影像都有其大量的研究。本文利用輻射狀的垂直梳型靜電致動器結合十字結構的彈簧來驅動一個二維轉動的微鏡面。所有的驅動結構皆位於微面下方，而且沒有外環的構造(gimbal structure)，這樣的設計提升了元件的填充因子(fill factor)，使其適合應用在微鏡面陣列方面。本元件是由Sandia SUMMiT-V的製程的製造，其中包含了五層由多晶矽沉積而成的結構層(structural layers)。元件的設計包含了許多參數：三種不同彈簧結構以及移動梳型手指(movable comb finger)和固定梳型手指(fixed comb finger)之間的間隔等變數。元件的特性與參數彼此之間的關係將會被討論。Microelectromechanical System (MEMS) scanners have been extensively studied in recent years due to their compactness and capability of optical beam steering, which can be applied to various applications such as optical fiber communication, biological imaging, and display technologies. In this thesis, a two-axis MEMS scanner driven by radial vertical combdrive actuators has been demonstrated. A cross-bar spring structure is designed to obtain two rotational degrees of freedom (DOFs), enabling the dual-axis rotation without gimbal structure. Both the vertical comdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. The device is fabricated by a five-layer polysilicon surface micromachining process (SUMMiT-V). Three types of spring designs were evaluated with modal analysis using ANSYS and the resonant frequencies is measured as 7 kHz /12 kHz for x-axis / y-axis rotation. Moreover, devices with different parameter values are characterized and discussed. For one of the devices, the measured mechanical rotation angles of ?6.68? at 43 V and ?2.16? at 65.5 V for rotation about x- and y-axis, respectively.誌謝..................................................................................................................................I文摘要...........................................................................................................................IIbstract............................................................................................................................IIIontents...........................................................................................................................IVist of Figures.................................................................................................................VIist of Tables...................................................................................................................IXhapter 1 Introductionshapter 2 MEMS Actuation Mechanisms-1 Electro-Thermal Actuations..............................................................................7-2 Magnetic Actuations.........................................................................................8-3 Piezoelectric Actuations....................................................................................9-4 Electrostatic Actuations...................................................................................10-4.1 Actuation principle and pull-in investigation......................................11-4.2 Parallel-plate electrostatic actuators....................................................13-4.3 Combdrive electrostatic actuators.......................................................16hapter 3 Design and Fabrication-1 Surface Micromachining.................................................................................21-2 SUMMiT VTM Process....................................................................................22-3 Device Structure and Variant Designs.............................................................24-3.1 Structure layers of the two-axis scanner..............................................26-3.2 Device parameters...............................................................................28hapter 4 Results and Discussion-1 Frequency Response........................................................................................32-1.1 Modal analysis.....................................................................................32-1.2 Experimental results of resonant frequency........................................32-2 Experiment Setup............................................................................................37-2.1 Principle of white light interferometer................................................37-2.2 Experiment setup.................................................................................41-3 Device Characteristics and Discussions..........................................................41-3.1 DC characteristics of device Type I.....................................................41-3.2 DC characteristics of device Type II....................................................51-3.3 DC characteristics of device Type III..................................................55-3.4 DC characteristics of device with circular mirror................................57hapter 5 Conclusionseferences2706234 bytesapplication/pdfen-US微機電雙軸掃描式微鏡片輻射狀梳型致動器MEMStwo-axis scannerradial comb-drive actuatorssmall form factorsurface micromachiningthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/188435/1/ntu-97-R95941085-1.pdf