Novel NEMS Gas Detectors for Micro Gas Chromatograph

Chao-Hao ChenChang-Jung HsiehHsu-Kuei LinTa-Shun LeePei-Hung ChenChao-Hung ChouChia-Jung LuWEI-CHENG TIAN2018-09-102018-09-102010-10http://scholars.lib.ntu.edu.tw/handle/123456789/359453Novel NEMS Gas Detectors for Micro Gas Chromatographconference paper