Low-Order Models for Fast Dynamical Simulation of MEMS Microstructures

E. HungY.-J. YangS. SenturiaYAO-JOE YANG2021-11-252021-11-251997https://scholars.lib.ntu.edu.tw/handle/123456789/587811https://www.scopus.com/inward/record.uri?eid=2-s2.0-0030654981&partnerID=40&md5=b67b836dc113ede4a3c894c433eb733aChicagoLow-Order Models for Fast Dynamical Simulation of MEMS Microstructuresconference paper2-s2.0-0030654981