Chen L.-CTan P.-JWu G.-WLin C.-JNguyen D.T.LIANG-CHIA CHEN2022-03-222022-03-22202126659174https://www.scopus.com/inward/record.uri?eid=2-s2.0-85122681581&doi=10.1016%2fj.measen.2021.100165&partnerID=40&md5=ecb8a04884edd81cf339562052200043https://scholars.lib.ntu.edu.tw/handle/123456789/598946A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area scanning. In the optical design, an area-scan type chromatic dispersive objective is specially designed to achieve measuring specification. Based on a self-developed chromatic dispersive objective, the FOV for one shot measurement can be reached to 1.8×1.3 mm2 which is immersive to microscopic profilometry. The spectral image captured by the multispectral sensor at each pinhole position has a unique spectrum pattern corresponding to its conjugate measured depth. A normalized cross-correlation (NCC) algorithm is developed to establish a spectrum-depth response curve with its corresponding spectrum pattern sets for accurate reconstruction of the tested 3D surface profile. With real test on standard targets, the measurement repeatability for a single surface depth is less than 0.6 μm. ? 2021Automated optical inspection (AOI)Chromatic confocal microscopyDigital micromirror deviceMultispectral sensorOptical metrology[SDGs]SDG7conference paper10.1016/j.measen.2021.1001652-s2.0-85122681581