Design and processing of integrated micro accel-erometers using standard cmos process

Dai, C.-L.C.-L.DaiLu, S.-S.S.-S.LuChang, P.-Z.P.-Z.ChangPEI-ZEN CHANG2020-04-282020-04-281997https://scholars.lib.ntu.edu.tw/handle/123456789/486873Design and processing of integrated micro accel-erometers using standard cmos processjournal article10.1080/02533839.1997.97418052-s2.0-0030644077https://www.scopus.com/inward/record.uri?eid=2-s2.0-0030644077&doi=10.1080%2f02533839.1997.9741805&partnerID=40&md5=6b8af2c1b32c394304317da0c5ce5535