Effect of rapid thermal annealing on carrier lifetimes of arsenic-ion-implanted GaAs

Lin, G.-R.G.-R.LinChen, W.-C.W.-C.ChenGanikhanov, F.F.GanikhanovChang, C.-S.C.-S.ChangPan, C.-L.C.-L.PanGONG-RU LIN2018-09-102018-09-101996http://www.scopus.com/inward/record.url?eid=2-s2.0-0000173763&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/323938Effect of rapid thermal annealing on carrier lifetimes of arsenic-ion-implanted GaAsjournal article