H. J. TsaiC. C. ChangY. R. JengS. L. ChenSIH-LI CHEN2021-10-072021-10-072006http://www.elsevier.com/locate/issn/13594311https://scholars.lib.ntu.edu.tw/handle/123456789/584175The Characteristic of Abrasive Particle in Chemical – Mechanical Polishingjournal article