Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering

Yang, PengPengYangSung, Chia-chiChia-chiSungFuh, Yiin-kuenYiin-kuenFuhChu, Chun-LinChun-LinChuLo, Chih-HungChih-HungLo2012-10-312018-06-282012-10-312018-06-282012http://ntur.lib.ntu.edu.tw//handle/246246/244376en-USTi-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputteringjournal article10.1016/S1003-6326(11)61329-02-s2.0-84863704252http://ntur.lib.ntu.edu.tw/bitstream/246246/244376/-1/10.pdf