Yeh, J.-L.J.-L.YehSI-CHEN LEE2020-06-112020-06-111996https://scholars.lib.ntu.edu.tw/handle/123456789/498804Structural and optical properties of amorphous silicon oxynitridejournal article10.1063/1.3608092-s2.0-0029733914https://www.scopus.com/inward/record.uri?eid=2-s2.0-0029733914&doi=10.1063%2f1.360809&partnerID=40&md5=08c0a2e5f10b372d16982fe710377625