Metal-semiconductor-metal directly illuminated electron detector and secondary electron detector with metal nano-rod array and trench structure to enhance the performance

CHIEH-HSIUNG KUANKUO-CHUAN HOLee, M.-L.M.-L.LeeHo, K.-C.K.-C.HoCHIEH-HSIUNG KUANKUO-CHUAN HO2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84879516432&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372476[SDGs]SDG7Metal-semiconductor-metal directly illuminated electron detector and secondary electron detector with metal nano-rod array and trench structure to enhance the performanceconference paper10.1149/1.3687432