~20% Idsat improvement in the Si 3D FinFET with the implement of D-SMT process

M. H.LiaoP.-G. ChenC. P. Hsieh2019-03-112019-03-112015https://scholars.lib.ntu.edu.tw/handle/123456789/404520Canada~20% Idsat improvement in the Si 3D FinFET with the implement of D-SMT processconference proceedings