Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope

Dept. of Mech. Eng., National Taiwan Univ.Huang, Kuang-YuhKuang-YuhHuangHwu, En-TeEn-TeHwuChow, Hsin-YiHsin-YiChowKUANG-YUH HUANG2007-04-192018-06-282007-04-192018-06-282005-07http://ntur.lib.ntu.edu.tw//handle/246246/200704191001174application/pdf314901 bytesapplication/pdfen-USDevelopment of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscopejournal article10.1109/ICMECH.2005.1529345http://ntur.lib.ntu.edu.tw/bitstream/246246/200704191001174/1/01529345.pdf