Influence of surface roughness and interfacial layer on the infrared spectra of V-CVD grown 3C-SiC/Si (100) epilayers

CHEE-WEE LIUTalwar, D.N.D.N.TalwarFeng, Z.C.Z.C.FengLiu, C.W.C.W.LiuTin, C.-C.C.-C.TinCHEE-WEE LIU2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84868021839&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372784Influence of surface roughness and interfacial layer on the infrared spectra of V-CVD grown 3C-SiC/Si (100) epilayersjournal article10.1088/0268-1242/27/11/115019