公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2008 | Knowledge engineering of analysis tool application processes for yield symptom identification | Su, F.-H.; Chang, S.-C.; Tsai, Y.-J.; Lu, C.-Y.; Fan, C.-M.; SHI-CHUNG CHANG | IEEE International Symposium on Semiconductor Manufacturing Conference | | | |
2007 | Service oriented platform design for collaborative engineering data analysis | Lee, J.-R.; Chang, S.-C.; Su, F.-H.; Fan, C.-M.; SHI-CHUNG CHANG | IEEE International Symposium on Semiconductor Manufacturing Conference | 2 | 0 | |
2000 | SHEWMAC: An end-of-line SPC scheme via exponentially weighted moving statistics | Fan, C.-M.; SHI-CHUNG CHANG ; RUEY-SHAN GUO ; Kung, H.-H.; You, J.-C.; Chen, H.-P.; Lin, S.; Wei, C.-S. | 2000 Semiconductor Manufacturing Technology Workshop | 2 | 0 | |