公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2006 | The characteristic of abrasive particle in chemical-mechanical polishing | Tsai, H. J.; Chang, C. C.; Jeng, Y. R.; Chen, S. L.; SIH-LI CHEN | Progress on Advanced Manufacture for Micro/Nano Technology 2005 | |||
2006 | The characteristic of abrasive particle in chemical-mechanical polishing | Tsai, H. J.; Chang, C. C.; Jeng, Y. R.; Chen, S. L.; CHIEN-CHENG CHANG | Progress on Advanced Manufacture for Micro/Nano Technology 2005, Pt 1 and 2 |