公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2001 | Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process | Dai, C.-L.; Yen, K.; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | 9 | 10 | |
1998 | Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors | Chang, P.; Chang, C.; Yen, K.; PEI-ZEN CHANG | Journal of Intelligent Material Systems and Structures | | | |
1998 | High aspect-ratio fine-line metallization | Chang, C.; Chang, P.; Yen, K.; SHEY-SHI LU ; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | 4 | 0 | |
2000 | A wideband electrostatic microwave switch fabricated by surface micromachining | Chang, C.; Dai, C.-L.; Chen, J.-Y.; Chen, H.; Yen, K.; Chiou, J.-H.; PEI-ZEN CHANG | Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an | 8 | 7 | |