Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
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2004 | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; PING-HEI CHEN ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Proceedings of SPIE - The International Society for Optical Engineering | 1 | 0 |