公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
0 | Charged-Particle-Beam Patterning Without Resist | Kuen-Yu Tsai; Miin-Jang Chen; Samuel C. Pan; KUEN-YU TSAI | ||||
2012 | Effect of hydrogen participation on the improvement in electrical characteristics of HfO2 gate dielectrics by post-deposition remote N2, N2/H2, and NH3 plasma treatments | M. H.Liao ; Li-Tien Huang; Ming-Lun Chang; Jhih-Jie Huang; Chin-Lung Kuo; Hsin-ChihLin; Min-Hung Lee; Miin-Jang Chen | Journal of Physics D: Applied Physics | |||
0 | Method For Non-Resist Nanolithography | Miin-Jang Chen; Kuen-Yu Tsai; Chee-Wee Liu; KUEN-YU TSAI | ||||
2017 | Projection Patterning With Exposure Mask | Kuen-Yu Tsai*; Miin-Jang Chen; Si-Chen Lee (National Taiwan University/Taiwan Semiconductor Manufacturing Company); KUEN-YU TSAI | ||||
0 | Projection Patterning With Exposure Mask | Kuen-Yu Tsai; Miin-Jang Chen; Si-Chen Lee; KUEN-YU TSAI | ||||
2015 | Surface-enhanced Raman spectroscopy (SERS) of textured structures with anti-reflection by wet etching and island lithography | Hsin-Chia Ho; Bo-Kai Chao; Hsin-Hung Cheng; Li-Wei Nien; Miin-Jang Chen; Tadaaki Nagao; JIA-HAN LI ; Chun-Hway Hsueh* | JSAP-OSA Joint Symposia2015 (The 76th JSAP Autumn Meeting 2015) |