| Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
| 2004 | A novel method for evaluating the thickness of silicon membrane using a micromachined acoustic wave sensor | Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN | Tamkang Journal of Science and Engineering | | | |
| 2004 | A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor | Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y | Tamkang Journal of Science and Engineering | | | |
| 2004 | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; PING-HEI CHEN ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Proceedings of SPIE - The International Society for Optical Engineering | 1 | 0 | |
| 2004 | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN | Proceedings of SPIE - The International Society for Optical Engineering | 1 | 0 | |
| 2004 | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | 1 | 0 | |
| 2004 | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN | Proceedings of SPIE - The International Society for Optical Engineering | 1 | 0 | |
