第 1 到 3 筆結果,共 3 筆。
公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 | |
---|---|---|---|---|---|---|---|
1 | 2015 | Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning | Fang, S.-Y.; Tai, Y.-S.; Chang, Y.-W.; YAO-WEN CHANG | 20th Asia and South Pacific Design Automation Conference, ASP-DAC 2015 | 7 | 0 | |
2 | 2015 | Stitch-aware routing for multiple e-beam lithography | Liu, I.-J.; Fang, S.-Y.; Chang, Y.-W.; YAO-WEN CHANG | IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems | 6 | 6 | |
3 | 2015 | EUV and e-beam manufacturability: Challenges and solutions | Chang, Y.-W.; Liu, R.-G.; Fang, S.-Y.; YAO-WEN CHANG | Design Automation Conference | 15 | 0 |