Results 1-3 of 3 (Search time: 0.008 seconds).
Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link | |
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1 | 2015 | EUV and e-beam manufacturability: Challenges and solutions | YAO-WEN CHANG ; Liu, R.-G.; Fang, S.-Y. | Design Automation Conference | |||
2 | 2015 | Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning | Fang, S.-Y.; Tai, Y.-S.; YAO-WEN CHANG | 20th Asia and South Pacific Design Automation Conference, ASP-DAC 2015 | |||
3 | 2015 | Stitch-aware routing for multiple e-beam lithography | Liu, I.-J.; Fang, S.-Y.; YAO-WEN CHANG | IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems |