https://scholars.lib.ntu.edu.tw/handle/123456789/120135
標題: | 可形變高分子薄膜材料之光學特性研究 | 作者: | 蘇國棟 | 關鍵字: | 微光機電;高分子聚合物;表面粗糙;大形變量;耐用度;Optical Micro-Electro-Mechanical Systems;Polymer;Surface Roughness;Large Deformation;Reliability | 公開日期: | 31-十月-2005 | 出版社: | 臺北市:國立臺灣大學光電工程學研究所 | 摘要: | 有別於傳統以矽為主的微機電技術,本計畫研究開發新的製程使用柔軟的高分子聚合 物—無結晶性氟基化合物 (amorphous fluorocarbinate polymer)。此方法和傳統的矽製程最大 的差異在於除了堅硬的材質使用外,還需加入可相容於傳統矽製程的高分子物質。比起以 矽為主的化合物, 這些高分子物質通常1000 倍的柔軟並且可產生 10 倍以上的形變. 除 此之外, 高分子聚合物可長成的厚度可從數奈米 (nanometer) 到數厘米 (millimeter) 更增加此方法的應用彈性. 而這些將使設計人員有著更多可使用資源. 其他的優點還包 括:需要較少能量產生形變、機械阻尼可減少高頻率雜訊、光學系統需較少光學元件以及 緊緻封裝。 經由此計畫,對這方面應用的高分子聚合物有系統的分析及如何改善皆有基本了解。 因此本計畫將經由實驗及模擬的方式來研究經由微機電製造出來的高分子聚合物之光學特 性,包含了1)表面光滑度和分子聚合及製程間的關係及2)在高形變下之耐用性。 最後總結,本計畫以研究高分子聚合物之物質特性為主,對這些高分子聚合物的了解 將有助於未來對此一物質在微光機電上的應用。 In order to overcome difficulties mentioned above and explore the new territory of optical MEMS, a new class of MEMS devices has begun to surface -- components made with highly compliant polymeric materials as a principal design element. This platform differs from conventional MEMS by adding a set of softer, more compliant, polymeric materials to the list of conventional rigid silicon-based materials used in traditional MEMS. In this project, we explore the possibility of using amorphous fluoroplymer, also known as CYTOP®. The compliant materials used in this new class of MEMS devices are as much as three orders of magnitude less stiff and can easily be tailored over a range of three orders of magnitude. Additionally, they can be deposited in a much broader range of layer thicknesses. This very wide range of flexibility expands the design space for MEMS devices far beyond what is possible with traditional silicon-based materials. There are several other advantages that compliant polymers enjoys over silicon-based MEMS, including mechanical deflection requires much lower energy, mechanical damping can be included to avoid high frequency noise, fewer discrete components provide better reliability at lower cost, and compact package design permits superior integration. Through this project, we have systematic studies and fundamental understandings on how compliant polymers can be improved and be optimized. In this project, we explored this not-yet-well-known field and conduct both simulation and experiments on how the polymer material can be used to make deformable surface and its compatibilities with existing MEMS technology. The project will focus on the optical properties of polymer material fabricated by MEMS technology in the following areas, surface roughness and its relation to polymer structures/fabrication process and environmental resistance of various polymers. 2 To conclude, this is the initial efforts to study the material properties of amorphous fluorcarbinate polymer for the application in Optical MEMS. The results will provide deep understandings of compliant polymer materials and form the foundation of future development for micro optics. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/11242 | 其他識別: | 932218E002135 | Rights: | 國立臺灣大學光電工程學研究所 |
顯示於: | 光電工程學研究所 |
檔案 | 描述 | 大小 | 格式 | |
---|---|---|---|---|
932218E002135.pdf | 2.42 MB | Adobe PDF | 檢視/開啟 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。