https://scholars.lib.ntu.edu.tw/handle/123456789/293600
Title: | Formation of submicron T-gate by rapid thermally reflowed resist with metal transfer layer | Authors: | Meng, C.C. Liao, G.R. Lu, S.S. SHEY-SHI LU |
Issue Date: | 2001 | Journal Volume: | 37 | Journal Issue: | 16 | Start page/Pages: | 1045-1046 | Source: | Electronics Letters | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0035797484&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/293600 |
DOI: | 10.1049/el:20010718 |
Appears in Collections: | 電機工程學系 |
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