https://scholars.lib.ntu.edu.tw/handle/123456789/331609
標題: | The effect of damping and mode analysis for the flow rate in micropumps | 作者: | Lan, W.P. Chang, J.S. Wu, K.C. Shih, Y.C. KUANG-CHONG WU |
關鍵字: | Mode analysis; Piezoelectrical; Solid-fluid coupling; Valveless micropump | 公開日期: | 2007 | 卷: | 3 | 起(迄)頁: | 141-144 | 來源出版物: | 2007 NSTI Nanotechnology Conference and Trade Show | 摘要: | In this work, a 3-D simulation is performed to study for the solid-fluid coupling effect driven by piezoelectric materials and utilizes asymmetric obstacles to control the flow direction. The result of simulation is also verified. For a micropump, it is crucial to find the optimal working frequency which produce maximum net flow rate. The PZT plate vibrates under the first mode, which is symmetric. Adjusting the working frequency, the maximum flow rate can be obtained. For the micrpump we studied, the optimal working frequency is 3.2K Hz. At higher working frequency, say 20K Hz, the fluid-solid membrane may come out a intermediate mode, which is different from the first mode and the second mode. It is observed that the center of the mode drifts. Meanwhile, the result shows that a phase shift lagging when the excitation force exists in the vibration response. Finally, at even higher working frequency, say 30K Hz, a second vibration mode is observed. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34547994701&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/331609 https://www.scopus.com/inward/record.uri?eid=2-s2.0-34547994701&partnerID=40&md5=2df575e54488f1ce92a8bc4e9df392d9 |
SDG/關鍵字: | Computer simulation; Flow control; Flow rate; Piezoelectric materials; Pumps; Mode analysis; Solid-fluid coupling; Valveless micropumps; MEMS |
顯示於: | 應用力學研究所 |
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