https://scholars.lib.ntu.edu.tw/handle/123456789/332069
Title: | A two-axis MEMS scanner driven by radial vertical combdrive actuators | Authors: | Chiou, S.-J. Hsieh, T.-L. Tsai, J.-C. Sun, C.-W. Hah, D. Wu, M.C. JUI-CHE TSAI |
Issue Date: | 2007 | Start page/Pages: | 83-84 | Source: | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-43049148556&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/332069 |
DOI: | 10.1109/OMEMS.2007.4373851 |
Appears in Collections: | 光電工程學研究所 |
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