https://scholars.lib.ntu.edu.tw/handle/123456789/332075
Title: | Sidewall smoothing for Si/SiO2 waveguides by excimer laser reformation | Authors: | Hung, S.-C. Liang, E.-Z. CHING-FUH LIN |
Issue Date: | 2007 | Source: | Conference on Lasers and Electro-Optics Europe | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-51249115804&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/332075 |
DOI: | 10.1109/CLEOE-IQEC.2007.4386517 |
Appears in Collections: | 電機工程學系 |
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