https://scholars.lib.ntu.edu.tw/handle/123456789/341080
Title: | A miniature micro-machined millimeter-wave bandpass filter by complementary metal-oxide-semiconductor compatible inductively-coupled-plasma deep-trench technology | Authors: | Chang, J.-F. Lin, Y.-S. Chen, C.-C. Chen, C.-Z. Wang, T. Lu, S.-S. SHEY-SHI LU |
Issue Date: | 2008 | Journal Volume: | 47 | Journal Issue: | 1 | Start page/Pages: | 68-73 | Source: | Japanese Journal of Applied Physics | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-38549157093&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/341080 |
DOI: | 10.1143/JJAP.47.68 |
Appears in Collections: | 電機工程學系 |
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