https://scholars.lib.ntu.edu.tw/handle/123456789/342848
Title: | Fabrication of Sub-Quarter-Micron Grating Patterns by Employing DUV Holographic Lithography | Authors: | L. A. Wang C. H. Lin H. L. Chen LON A. WANG |
Issue Date: | Jan-1998 | Start page/Pages: | 199-200 | Source: | Micro-and-Nano-Engineering | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/342848 |
Appears in Collections: | 光電工程學研究所 |
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