https://scholars.lib.ntu.edu.tw/handle/123456789/356042
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Wang, F.-C. | en_US |
dc.contributor.author | Hong, M.-F. | en_US |
dc.contributor.author | Yen, J.-Y. | en_US |
dc.contributor.author | Wang, Fu-Cheng | en_US |
dc.contributor.author | Hong, Min-Feng | en_US |
dc.contributor.author | Yen, Jia-Yush | en_US |
dc.contributor.author | FU-CHENG WANG | en_US |
dc.contributor.author | JIA-YUSH YEN | en_US |
dc.creator | Yen, Jia-Yush;Hong, Min-Feng;Jia-Yush Yen;Wang, Fu-Cheng;Yen, Jia-Yush;Hong, Min-Feng;Wang, Fu-Cheng;Yen, J.-Y.;Hong, M.-F.;Wang, F.-C. | - |
dc.date.accessioned | 2018-09-10T08:08:46Z | - |
dc.date.available | 2018-09-10T08:08:46Z | - |
dc.date.issued | 2010 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-77955321322&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/356042 | - |
dc.language | en | en |
dc.relation.ispartof | Japanese Journal of Applied Physics | en_US |
dc.source | AH | - |
dc.title | Robust control design for vibration isolation of an electron beam projection lithography system | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1143/JJAP.49.06GE04 | - |
dc.identifier.scopus | 2-s2.0-77955321322 | - |
dc.identifier.isi | WOS:000278966300019 | - |
dc.relation.journalvolume | 49 | - |
dc.relation.journalissue | 6 PART 2 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.orcid | 0000-0001-5011-7934 | - |
crisitem.author.orcid | 0000-0001-8795-9211 | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 機械工程學系 |
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