https://scholars.lib.ntu.edu.tw/handle/123456789/356042
Title: | Robust control design for vibration isolation of an electron beam projection lithography system | Authors: | Wang, F.-C. Hong, M.-F. Yen, J.-Y. Wang, Fu-Cheng Hong, Min-Feng Yen, Jia-Yush FU-CHENG WANG JIA-YUSH YEN |
Issue Date: | 2010 | Journal Volume: | 49 | Journal Issue: | 6 PART 2 | Source: | Japanese Journal of Applied Physics | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-77955321322&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/356042 |
DOI: | 10.1143/JJAP.49.06GE04 |
Appears in Collections: | 機械工程學系 |
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