https://scholars.lib.ntu.edu.tw/handle/123456789/357869
Title: | Fabrication and simulation of large-scale MEMS deformable mirror for wave front active control | Authors: | Lin, P.-Y. Hsieh, H.-T. GUO-DUNG JOHN SU |
Issue Date: | 2010 | Journal Volume: | 7816 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-77957986288&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/357869 |
DOI: | 10.1117/12.861097 |
Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.