https://scholars.lib.ntu.edu.tw/handle/123456789/359317
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Fu-Min Wang | en_US |
dc.contributor.author | Susumu Ono | en_US |
dc.contributor.author | Hsin-Hung Su | en_US |
dc.contributor.author | Kuen-Yu Tsai | en_US |
dc.contributor.author | Chieh-Hsiung Kuan | en_US |
dc.contributor.author | KUEN-YU TSAI | zz |
dc.creator | Fu-Min Wang;Susumu Ono;Hsin-Hung Su;Kuen-Yu Tsai;Chieh-Hsiung Kuan | - |
dc.date.accessioned | 2018-09-10T08:18:22Z | - |
dc.date.available | 2018-09-10T08:18:22Z | - |
dc.date.issued | 2010-06 | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/359317 | - |
dc.language | en | en |
dc.relation.ispartof | The 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication | - |
dc.source | AH-anncc | - |
dc.title | 10 nm lines with 14 nm half pitch grating written in HSQ by electron beam direct write at 5 keV | - |
dc.type | conference paper | en |
dc.relation.pages | 2-19 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.grantfulltext | none | - |
item.openairetype | conference paper | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0002-2531-1716 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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