https://scholars.lib.ntu.edu.tw/handle/123456789/374083
Title: | Electron-beam proximity effect model calibration for fabricating scatterometry calibration samples | Authors: | Yu-Tian Shen Liu, C.-H. Chen, C.-Y. Ng, H.-T. Tsai, K.-Y. Wang, F.-M. Kuan, C.-H. Lee, Y.-M. Cheng, H.-H. Li, J.-H. KUEN-YU TSAI CHIEH-HSIUNG KUAN JIA-HAN LI |
Issue Date: | Feb-2012 | Start page/Pages: | 83242K | Source: | Advanced Lithography - Proceeding of SPIE | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/374083 | DOI: | 10.1117/12.918109 |
Appears in Collections: | 電機工程學系 |
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