https://scholars.lib.ntu.edu.tw/handle/123456789/429662
Title: | Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range | Authors: | Y. Y. Li Y. W. Lee T. S. Ho J. H. Wang I C. Wu T. W. Hsu Y. T. Chen S. L. Huang SHENG-LUNG HUANG |
Issue Date: | 2018 | Journal Volume: | 43 | Start page/Pages: | 27919 | Source: | Optics Letters | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/429662 | ISSN: | 1469592 | DOI: | 10.1364/ol.43.004029 |
Appears in Collections: | 光電工程學研究所 |
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