https://scholars.lib.ntu.edu.tw/handle/123456789/447813
Title: | Optical 3-D profilometry for measuring semiconductor wafer surfaces with extremely variant reflectivities | Authors: | Chen, L.-C. Duong, D.-H. Chen, C.-S. LIANG-CHIA CHEN |
Issue Date: | 2019 | Journal Volume: | 9 | Journal Issue: | 10 | Source: | Applied Sciences (Switzerland) | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447813 | DOI: | 10.3390/app9102060 |
Appears in Collections: | 機械工程學系 |
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