https://scholars.lib.ntu.edu.tw/handle/123456789/447869
Title: | Innovative simultaneous confocal full-field 3D surface profilometry for in situ automatic optical inspection (AOI) | Authors: | Chen, L.-C. Chang, Y.-W. LIANG-CHIA CHEN |
Issue Date: | 2010 | Journal Volume: | 21 | Journal Issue: | 6 | Source: | Measurement Science and Technology | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447869 | DOI: | 10.1088/0957-0233/21/6/065301 |
Appears in Collections: | 機械工程學系 |
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