https://scholars.lib.ntu.edu.tw/handle/123456789/447889
Title: | High-bandwidth dynamic full-field profilometry for nano-scale characterization of MEMS | Authors: | Chen, L.-C. Huang, Y.-T. Chang, P.-B. LIANG-CHIA CHEN |
Issue Date: | 2006 | Journal Volume: | 48 | Journal Issue: | 1 | Start page/Pages: | 1058-1062 | Source: | Journal of Physics: Conference Series | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447889 | DOI: | 10.1088/1742-6596/48/1/197 |
Appears in Collections: | 機械工程學系 |
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