https://scholars.lib.ntu.edu.tw/handle/123456789/448000| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Liao, M.-H. | en_US |
| dc.contributor.author | Chen, C.-H. | en_US |
| dc.contributor.author | MING-HAN LIAO | zz |
| dc.creator | MING-HAN LIAO;Chen, C.-H.;Liao, M.-H. | - |
| dc.date.accessioned | 2020-01-13T08:22:44Z | - |
| dc.date.available | 2020-01-13T08:22:44Z | - |
| dc.date.issued | 2013 | - |
| dc.identifier.issn | 2158-3226 | - |
| dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/448000 | - |
| dc.relation.ispartof | AIP Advances | - |
| dc.title | The novel chamber hardware design to improve the thin film deposition quality in both 12 <sup>?</sup> (300 mm) and 18 <sup>?</sup> (450 mm) wafers with the development of 3D full chamber modeling and experimental visual technique | en_US |
| dc.type | journal article | - |
| dc.identifier.doi | 10.1063/1.4816437 | - |
| dc.identifier.url | http://aip.scitation.org/doi/10.1063/1.4816437 | - |
| dc.relation.pages | 072117 | - |
| dc.relation.journalvolume | 3 | - |
| dc.relation.journalissue | 7 | - |
| item.grantfulltext | none | - |
| item.fulltext | no fulltext | - |
| item.openairetype | journal article | - |
| item.cerifentitytype | Publications | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| crisitem.author.orcid | 0000-0003-2942-4520 | - |
| Appears in Collections: | 機械工程學系 | |
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