https://scholars.lib.ntu.edu.tw/handle/123456789/448399
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Tsai, H. J. | en_US |
dc.contributor.author | Chang, C. C. | en_US |
dc.contributor.author | Jeng, Y. R. | en_US |
dc.contributor.author | Chen, S. L. | en_US |
dc.contributor.author | SIH-LI CHEN | en_US |
dc.creator | SIH-LI CHEN;Chen, S. L.;Jeng, Y. R.;Chang, C. C.;Tsai, H. J. | - |
dc.date.accessioned | 2020-01-13T08:24:07Z | - |
dc.date.available | 2020-01-13T08:24:07Z | - |
dc.date.issued | 2006 | - |
dc.identifier.isbn | 978-0-87849-990-8 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/448399 | - |
dc.relation.ispartof | Progress on Advanced Manufacture for Micro/Nano Technology 2005 | - |
dc.title | The characteristic of abrasive particle in chemical-mechanical polishing | en_US |
dc.type | book chapter | en |
dc.identifier.isi | WOS:000235279200135 | - |
dc.relation.pages | 805-810 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.openairetype | book chapter | - |
item.grantfulltext | none | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.orcid | 0000-0002-8059-2434 | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 機械工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。