https://scholars.lib.ntu.edu.tw/handle/123456789/448399
Title: | The characteristic of abrasive particle in chemical-mechanical polishing | Authors: | Tsai, H. J. Chang, C. C. Jeng, Y. R. Chen, S. L. SIH-LI CHEN |
Issue Date: | 2006 | Start page/Pages: | 805-810 | Source: | Progress on Advanced Manufacture for Micro/Nano Technology 2005 | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448399 | ISBN: | 978-0-87849-990-8 |
Appears in Collections: | 機械工程學系 |
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