https://scholars.lib.ntu.edu.tw/handle/123456789/448555
Title: | A novel fabrication method for suspended high-aspect-ratio microstructures | Authors: | Yang, Y.-J. Kuo, W.-C. YAO-JOE YANG |
Issue Date: | 2005 | Journal Volume: | 15 | Journal Issue: | 11 | Start page/Pages: | 2184-2193 | Source: | Journal of Micromechanics and Microengineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448555 | DOI: | 10.1088/0960-1317/15/11/027 |
Appears in Collections: | 機械工程學系 |
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