https://scholars.lib.ntu.edu.tw/handle/123456789/487026
Title: | A micromachined ZnO/Si<inf>3</inf>N<inf>4</inf> Lamb wave device for ultraviloet sensing application | Authors: | Wang, W.-S. Wu, T.-T. TSUNG-TSONG WU |
Issue Date: | 2010 | Start page/Pages: | 493-498 | Source: | 2010 IEEE International Frequency Control Symposium, FCS 2010 | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/487026 | DOI: | 10.1109/FREQ.2010.5556279 |
Appears in Collections: | 應用力學研究所 |
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