https://scholars.lib.ntu.edu.tw/handle/123456789/491032
Title: | Applications of lithographic mask technology in fabrication of diamond dresser | Authors: | Shih, C.-J. Ou, S.-F. Yeh, C.-H. Lin, C.-S. Pan, Y.-N. CHAO-SUNG LIN |
Issue Date: | 2013 | Journal Volume: | 68 | Journal Issue: | 9-12 | Start page/Pages: | 2329-2334 | Source: | International Journal of Advanced Manufacturing Technology | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/491032 | DOI: | 10.1007/s00170-013-4845-9 |
Appears in Collections: | 材料科學與工程學系 |
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